[Download] "Semiconductor Process Reliability in Practice" by Zhenghao Gan, Waisum Wong & Juin J. Liou " eBook PDF Kindle ePub Free

📘 Read Now     📥 Download

eBook details

• Title: Semiconductor Process Reliability in Practice
• Author : Zhenghao Gan, Waisum Wong & Juin J. Liou
• Release Date : January 06, 2012
• Genre: Electrical Engineering,Books,Professional & Technical,Engineering,
• Pages : * pages
• Size : 46193 KB

Description

Proven processes for ensuring semiconductor device reliability

Co-written by experts in the field, Semiconductor Process Reliability in Practice contains detailed descriptions and analyses of reliability and qualification for semiconductor device manufacturing and discusses the underlying physics and theory. The book covers initial specification definition, test structure design, analysis of test structure data, and final qualification of the process. Real-world examples of test structure designs to qualify front-end-of-line devices and back-end-of-line interconnects are provided in this practical, comprehensive guide.

Coverage includes:
Basic device physics
Process flow for MOS manufacturing
Measurements useful for device reliability characterization
Hot carrier injection
Gate-oxide integrity (GOI) and time-dependent dielectric breakdown (TDDB)
Negative bias temperature instability
Plasma-induced damage
Electrostatic discharge protection of integrated circuits
Electromigration
Stress migration
Intermetal dielectric breakdown

PDF Books "Semiconductor Process Reliability in Practice" Online ePub Kindle